Characterization & Metrology
Accurate characterization and metrology are vital to validating crystal performance.
CRYSTALINNOV offers a suite of rare and advanced instruments to analyze crystalline structure, purity, and surface quality.
Our services support both R&D and industrial projects, enabling clients to de-risk their developments and ensure compliance with demanding standards.
CRYSTALINNOV?
By centralizing advanced equipment and expertise, we help clients achieve accurate, reproducible results that accelerate innovation and improve product reliability.
Tropel Interferometer

The interferometric profilometer measures wafers up to 200 mm with 50 nm accuracy, ideal for planarity and parallelism control.
- Flatness analysis: bow, warp, sori
- Parallelism analysis: TTV, LTV
- Applicable to round wafers from 2 to 6 inches
CRYSTALINNOV advantage: ensures wafers meet the highest requirements for planarity and uniformity.
Optical Profilometer

The optical profilometer performs surface texture and optical flatness measurements with nanometric resolution. It combines chromatic confocal and white light interferometry with a high-resolution CCD camera.
- Measures surface roughness down to 3 nm
- Resolution up to 0.3 µm
- Optional double rotary axis for complex measurements
CRYSTALINNOV advantage: delivers nanometric surface analysis for optimal optical and structural properties.
Altimet 520

The Altimet 520 enables optical geometric and dimensional measurements with high accuracy and efficiency.
- Measurement table: 200 × 200 mm
- Accuracy: ±2 µm or ±5 µm depending on dynamic range
- Automatic 2D measurements
- Generates statistical inspection reports
CRYSTALINNOV advantage: provides rapid, reliable geometric measurements independent of operator influence.
X-ray Diffractometer (Rigaku Smartlab)

The Rigaku Smartlab is a 4-circle diffractometer tailored for single crystals and epitaxial layers. It provides high-quality structural and crystallographic analysis.
- Performs miscut measurements
- Evaluates crystalline quality
- Generates reciprocal space maps
- Configurable for powder diffraction
- Includes Ge(220) channel cut for beam preparation
CRYSTALINNOV advantage: enables advanced crystallographic analysis to support R&D and industrial validation.
Infrared Spectrometer (FTIR)


The FTIR spectrometer detects impurities and analyzes structural features in crystals with precision and reliability.
- Identifies chemical impurities
- Detects structural defects
- Provides non-destructive testing
Utilizing cutting-edge FTIR (Fourier Transform Infrared) technology, the system identifies and quantifies materials by measuring their infrared absorption spectra. It provides a unique "molecular fingerprint" of samples, making it an indispensable tool for our quality control, routines, and material verification.
The entire optical bench of the FTIR spectrometer is housed in a sealed and evacuated (vacuum) environment, guaranteeing the measurements quality. A versatile and robust pyroelectric detector, DTGS operates at room temperature and requires no cooling. A PbSe detector is also available, offering enhanced sensitivity in the mid- to near-infrared range, and offers excellent stability and a broad spectral response.
Our FTIR spectrometer is also equipped to perform infrared measurements at low temperatures down to -180°C, using liquid nitrogen, enabling precise characterization of samples under cryogenic conditions. Equipped with both KBr and CaF₂ beam splitters, the system offers an extended spectral analysis. CaF₂ is ideal for high-energy near-IR measurements, offering excellent transparency in the 7000–4000 cm⁻¹ range, while KBr extends coverage into the mid-IR, down to 2000 cm⁻¹, ensuring accurate analysis of fundamental vibrational modes.
CRYSTALINNOV advantage: assures the purity of crystals by identifying trace impurities and defects.
X-ray Goniometer

The X-ray goniometer measures the orientation of crystalline samples with extreme accuracy, ensuring proper alignment for high-performance applications.
- Orientation accuracy: ~0.017°
- Repeatability: 10 arc seconds (0.00028°)
- Suitable for all crystal types
- Single-rotated or double-rotated cuts
The X-ray diffraction technology is applying the fundamental principles of Bragg’s Law (nλ = 2d·sinθ), which relates the wavelength of incident X-rays (λ) to the diffraction angle (θ) and the spacing between crystal planes (d), on a crystalline surface. The goniometer precisely varies the angle of incidence and detection to locate constructive interference patterns, allowing for detailed structural analysis. This technique enables accurate and reproducible crystallographic orientation measurements and is part of our routines to deliver our core products, as well as our R&D studies on advanced crystalline
CRYSTALINNOV advantage: guarantees precise crystal orientation for optimized device performance.
Microscope Keyence VHX-X1

x 4000, versatile, autofocus, large Depth of Field digital Microscope allows 360° observation and 2D/3D measurement for both surface defects observation and crystal quality analysis on the surface.